Parts For Sale TEGAL 47-593-002 TEGAL 47-593-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 47-593-002 Manufacturer TEGAL Part Number 47-593-002 Description Status Available Approx. Qty 39 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 39.0 US Other TEGAL Parts 39-741-004 ELECTRODE, LOWER 6" 37-383-004 39-680-003 ELECTRODE, CONEHEAD VENTED 46-810-001 40-467-001 39-894-001 52-171-001 52-047-002 40-790-001 FOCUS RING 40-304-001 ELECTRODE, INSULATOR LOWER 39-680-005 ELECTRODE, UPPER VENTED HARD ANOD. 150 mm 150 mm 25 slot Aluminum wafer carrier.
