Parts For Sale TEGAL 161-0040K TEGAL 161-0040K Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 161-0040K Manufacturer TEGAL Part Number 161-0040K Description VALVE, INLINE VACUUM Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Unknown 1.0 – Other TEGAL Parts 47-155-001 83-259-001 46-787-002 39-563-001 29-464-001 SPR, TEGAL KIT CHMBR GRND OEM PN equiv: 29-464-001 47-080-003 41-271-002 99-249-002 PCB TEGAL END POINT DETECTOR 15394-2 Spacer 80-200-121 BEARING DOOR T915 TEGAL CORPORATION