Parts For Sale TEGAL 37-181-001 TEGAL 37-181-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 37-181-001 Manufacturer TEGAL Part Number 37-181-001 Description Status Available Approx. Qty Unknown Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New – US Other TEGAL Parts 51-259-003 38-023-001 COOLING RING 52-050-001 46-1000-001 80-202-297 BELT 1/4W 115GRV 80-202-297 A4T1 PAD ETCHER TEGAL 903E 39-741-009 Tegal 903e lower electrode 52-167-001 58-046-001 37-471-001A