Parts For Sale TEGAL 200 TEGAL 200 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 200 Manufacturer TEGAL Part Number 200 Description ASHER, TEGAL PLASMALINE 200 8.5X7D METAL CHAMBER 5-8-02 Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Used 1.0 US Other TEGAL Parts 40-481-002 Insulator Ring 38-023-001 COOLING RING 37-180-001 23-193-003 44-888-001 99-287-003 SHUTTLE INTERFACE BOARD 32-301-001 44-957-001 37-221-001 UPPER ELECT, .014 HOLE NO RAD. 39-680-005 ELECTRODE, UPPER VENTED HARD ANOD.