Parts For Sale TEGAL 99-287-003 TEGAL 99-287-003 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 99-287-003 Manufacturer TEGAL Part Number 99-287-003 Description SHUTTLE INTERFACE BOARD Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Used 1.0 FR Other TEGAL Parts 33-349-004 ELECTRODE, CONDEHEAD UPPER 161-0040K VALVE, INLINE VACUUM 40-768-006 Insulator Ring 51-251-001 51-092-001 74-124-005 29-213-001 Kit O-Ring 42-960-003 80-202-357 O-Ring 37-221-001 UPPER ELECT, .014 HOLE NO RAD. 46-556-002 40-140-003 RING, INSULATOR, CERAMIC .20-99.5%
