Parts For Sale TEGAL 99-287-003 TEGAL 99-287-003 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 99-287-003 Manufacturer TEGAL Part Number 99-287-003 Description SHUTTLE INTERFACE BOARD Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Used 1.0 FR Other TEGAL Parts 99-247-003 SPATULA INTERFACE 39-680-003 ELECTRODE, CONEHEAD VENTED 80-195-450 80-1025-01 HEATER 40-295-003 FOCUS RING 42-456-003 42-180-001/002 39-533-001 37-668-001
