Parts For Sale TEGAL 99-287-003 TEGAL 99-287-003 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 99-287-003 Manufacturer TEGAL Part Number 99-287-003 Description SHUTTLE INTERFACE BOARD Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Used 1.0 FR Other TEGAL Parts 40-395-002 Ring Ceramic 125C Castellated 40-395-003 RING 4" CASTELLATED W/ FLAT CUTAWAY 93-229-005 RF CABLE 901E 40-467-001 42-362-001 47-101-002 39-894-001 41-387-001 99-249-002 PCB TEGAL END POINT DETECTOR 52-047-002 39-680-005 ELECTRODE, UPPER VENTED HARD ANOD. 200 ASHER, TEGAL PLASMALINE 200 8.5X7D METAL CHAMBER 5-8-02