Parts For Sale TEGAL 99-287-003 TEGAL 99-287-003 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 99-287-003 Manufacturer TEGAL Part Number 99-287-003 Description SHUTTLE INTERFACE BOARD Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Used 1.0 FR Other TEGAL Parts 39-861-002 42-667-001 51-267-001 23-193-003 44-421-001 32-172-001 39-733-004 Tegal 903e lower electrode 31-388-001 CONNECTER RF CONN ASSY 31-388-001 A4T1 PAD ETCHER TEGAL 903E 41-399-001 Tegal Part # 41-399-001 Rev.A Gasket, RF-90XE 39-735-004 Tegal 903e lower electrode