Parts For Sale TEGAL 99-287-003 TEGAL 99-287-003 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 99-287-003 Manufacturer TEGAL Part Number 99-287-003 Description SHUTTLE INTERFACE BOARD Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Used 1.0 FR Other TEGAL Parts 46-879-001 31-406-003 WAFER SENSOR ASSY-VCE 40-481-002 Insulator Ring 80-650-053 ACTUATOR 47-583-001 47-695-001 99-249-002 PCB TEGAL END POINT DETECTOR 50-056-001 40-140-003 RING, INSULATOR, CERAMIC .20-99.5%