Parts For Sale TEGAL 47-267-002 TEGAL 47-267-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 47-267-002 Manufacturer TEGAL Part Number 47-267-002 Description Status Available Approx. Qty 4 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 4.0 US Other TEGAL Parts 37-221-002 UPPER ELECT ANOD, NON ANODIZED 31-406-003 WAFER SENSOR ASSY-VCE 80-195-450 51-056-001 42-826-005 33-085-002 BELLOW,LWR ELCTD #33-085-002 A4T1 PAD ETCHER TEGAL 903E 39-380-001 50-088-001 29-464-001 SPR, TEGAL KIT CHMBR GRND OEM PN equiv: 29-464-001 99-249-002 PCB TEGAL END POINT DETECTOR 37-175-001A