Parts For Sale TEGAL 47-267-002 TEGAL 47-267-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 47-267-002 Manufacturer TEGAL Part Number 47-267-002 Description Status Available Approx. Qty 4 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 4.0 US Other TEGAL Parts 46-1006-001 47-339-005 52-050-001 29-464-001 SPR, TEGAL KIT CHMBR GRND OEM PN equiv: 29-464-001 52-041-001 40-790-001 FOCUS RING 58-046-001 47-736-001 150 mm 150 mm 25 slot Aluminum wafer carrier. 47-445-001