Parts For Sale TEGAL 37-222-002 TEGAL 37-222-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 37-222-002 Manufacturer TEGAL Part Number 37-222-002 Description Cooling Plate Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Unknown 1.0 – Other TEGAL Parts 161-0040K VALVE, INLINE VACUUM 99-247-003 SPATULA INTERFACE 46-776-003 32-174-001 58-043-004 41-354-003 46-272-003 44-439-001 150 mm 150 mm 25 slot Aluminum wafer carrier.
