Parts For Sale TEGAL 37-222-002 TEGAL 37-222-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 37-222-002 Manufacturer TEGAL Part Number 37-222-002 Description Cooling Plate Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Unknown 1.0 – Other TEGAL Parts 31-406-003 WAFER SENSOR ASSY-VCE 40-481-002 Insulator Ring 47-155-001 46-787-002 39-563-001 40-140-001 RING, CERAMIC INSULATOR 47-080-003 41-271-002 37-221-001 UPPER ELECT, .014 HOLE NO RAD. 39-818-001 SLEEVE,FIBER OPTIC #39-818-001 A4T1 PAD ETCHER TEGAL 903E 15394-2 Spacer
