Parts For Sale TEGAL 150 mm TEGAL 150 mm Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 150 mm Manufacturer TEGAL Part Number 150 mm Description 150 mm 25 slot Aluminum wafer carrier. Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Used 1.0 US Other TEGAL Parts 39-853-005 47-155-001 46-787-002 39-563-001 39-761-001 47-080-003 41-271-002 39-733-004 Tegal 903e lower electrode 15394-2 Spacer 31-388-001 CONNECTER RF CONN ASSY 31-388-001 A4T1 PAD ETCHER TEGAL 903E