Parts For Sale TEGAL 150 mm TEGAL 150 mm Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 150 mm Manufacturer TEGAL Part Number 150 mm Description 150 mm 25 slot Aluminum wafer carrier. Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Used 1.0 US Other TEGAL Parts 46-776-003 32-174-001 58-043-004 41-354-003 46-272-003 40-790-001 FOCUS RING 37-221-001 UPPER ELECT, .014 HOLE NO RAD. 41-399-001 Tegal Part # 41-399-001 Rev.A Gasket, RF-90XE 44-439-001