Parts For Sale TEGAL 150 mm TEGAL 150 mm Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 150 mm Manufacturer TEGAL Part Number 150 mm Description 150 mm 25 slot Aluminum wafer carrier. Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Used 1.0 US Other TEGAL Parts 29-345-021 KIT, CONS-STARTUP, HRE 1.1 40-481-002 Insulator Ring 37-180-001 23-193-003 39-741-026 Tegal 903e lower electrode 32-301-001 39-735-008 ELECTRODE, LOWER ANODIZED 6" 200 ASHER, TEGAL PLASMALINE 200 8.5X7D METAL CHAMBER 5-8-02 40-140-003 RING, INSULATOR, CERAMIC .20-99.5%