Parts For Sale TEGAL 150 mm TEGAL 150 mm Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 150 mm Manufacturer TEGAL Part Number 150 mm Description 150 mm 25 slot Aluminum wafer carrier. Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Used 1.0 US Other TEGAL Parts 46-879-001 33-349-004 ELECTRODE, CONDEHEAD UPPER 38-023-001 COOLING RING 47-583-001 47-695-001 41-362-002 32-415-002 40-576-003-C Ring Ceramic Focus Castellated 50-056-001