Parts For Sale TEGAL 150 mm TEGAL 150 mm Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 150 mm Manufacturer TEGAL Part Number 150 mm Description 150 mm 25 slot Aluminum wafer carrier. Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Used 1.0 US Other TEGAL Parts 51-251-001 51-092-001 74-124-005 99-138-004 PRINTED CIRCUIT BOARD TEGAL 99-138-004 TEMP MONITOR PCB 42-326-002 42-960-003 40-790-001 FOCUS RING 80-202-357 O-Ring 41-399-001 Tegal Part # 41-399-001 Rev.A Gasket, RF-90XE 46-556-002 200 ASHER, TEGAL PLASMALINE 200 8.5X7D METAL CHAMBER 5-8-02