Parts For Sale TEGAL 74-105-001 TEGAL 74-105-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 74-105-001 Manufacturer TEGAL Part Number 74-105-001 Description Status Available Approx. Qty Unknown Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New – US Other TEGAL Parts 83-286-001 80-195-450 99-287-003 SHUTTLE INTERFACE BOARD 1106915402 MOTOR AND PUMPP/N:1106915402 93-123-006 BELT 74107-002 40-790-001 FOCUS RING 83-254-002 83-288-001 150 mm 150 mm 25 slot Aluminum wafer carrier.