Parts For Sale TEGAL 83-254-002 TEGAL 83-254-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 83-254-002 Manufacturer TEGAL Part Number 83-254-002 Description Status Available Approx. Qty Unknown Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New – US Other TEGAL Parts 40-395-002 Ring Ceramic 125C Castellated 83-286-001 99-247-003 SPATULA INTERFACE CR1008-00104 83-259-001 CR1144-00104 99-138-004 PRINTED CIRCUIT BOARD TEGAL 99-138-004 TEMP MONITOR PCB 40-140-001 RING, CERAMIC INSULATOR 29-464-001 SPR, TEGAL KIT CHMBR GRND OEM PN equiv: 29-464-001 1106915402 MOTOR AND PUMPP/N:1106915402 CR1144-00103 CR1144-00103 CR1303-10202