Parts For Sale TEGAL 83-254-002 TEGAL 83-254-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 83-254-002 Manufacturer TEGAL Part Number 83-254-002 Description Status Available Approx. Qty Unknown Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New – US Other TEGAL Parts 93-229-005 RF CABLE 901E CR1113-00801 CR1113-00801 40-140-001 RING, CERAMIC INSULATOR CR1008-00408EX CR1008-00408EX CR1144-00104RW 00-0917-2 5" GUIDE RING #G00-0917-2 CR-1113-00301 CR1144-00103 CR1144-00103 41-399-001 Tegal Part # 41-399-001 Rev.A Gasket, RF-90XE 150 mm 150 mm 25 slot Aluminum wafer carrier.