Parts For Sale TEGAL 74-098-001 TEGAL 74-098-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 74-098-001 Manufacturer TEGAL Part Number 74-098-001 Description Status Available Approx. Qty 6 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 6.0 US Other TEGAL Parts 46-177-001 37-223-008 80-650-053 ACTUATOR 40-374-006 46-787-002 50-079-002 29-464-001 SPR, TEGAL KIT CHMBR GRND OEM PN equiv: 29-464-001 93-123-006 BELT 40-576-003-C Ring Ceramic Focus Castellated 80-202-357 O-Ring 41-399-001 Tegal Part # 41-399-001 Rev.A Gasket, RF-90XE 83-288-001
