Parts For Sale TEGAL 39-853-005 TEGAL 39-853-005 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 39-853-005 Manufacturer TEGAL Part Number 39-853-005 Description Status Available Approx. Qty 16 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 16.0 US Other TEGAL Parts 46-879-001 52-058-002 161-0040K VALVE, INLINE VACUUM 39-756-003 44-888-001 40-140-001 RING, CERAMIC INSULATOR 42-683-001 39-956-001 42-960-003 44-957-001 40-304-001 ELECTRODE, INSULATOR LOWER 31-388-001 CONNECTER RF CONN ASSY 31-388-001 A4T1 PAD ETCHER TEGAL 903E