Parts For Sale TEGAL 53-021-001 TEGAL 53-021-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 53-021-001 Manufacturer TEGAL Part Number 53-021-001 Description Status Available Approx. Qty Unknown Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New – US Other TEGAL Parts 57-027-001 39-853-005 74-038-001 56-006-001 40-159-001 ROD SAPPHIRE .25DIA STRAIGHT 74-003-002 80-200-342 BAND CONT,FEM .125PIN .320L,BC 80-200-342 A4T1 PAD ETCHE ... 83-108-001 39-680-005 ELECTRODE, UPPER VENTED HARD ANOD. 200 ASHER, TEGAL PLASMALINE 200 8.5X7D METAL CHAMBER 5-8-02 83-288-001