Parts For Sale TEGAL 53-021-001 TEGAL 53-021-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 53-021-001 Manufacturer TEGAL Part Number 53-021-001 Description Status Available Approx. Qty Unknown Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New – US Other TEGAL Parts 74-106-001 58-053-001 00-0917-2 5" GUIDE RING #G00-0917-2 40-159-001 ROD SAPPHIRE .25DIA STRAIGHT 40-304-001 ELECTRODE, INSULATOR LOWER 83-108-001 50-056-001 CR1008-00206RW 83-288-001 150 mm 150 mm 25 slot Aluminum wafer carrier.
