Parts For Sale TEGAL 53-066-001 TEGAL 53-066-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 53-066-001 Manufacturer TEGAL Part Number 53-066-001 Description Status Available Approx. Qty Unknown Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New – US Other TEGAL Parts 74-106-001 58-053-001 38-023-001 COOLING RING 00-0917-2 5" GUIDE RING #G00-0917-2 40-295-003 FOCUS RING 37-221-001 UPPER ELECT, .014 HOLE NO RAD. 83-108-001 CR1008-00206RW 55-008-001 BELT SPAT 83-288-001 80-200-144 BSHG BALL 3/8B 5/8OD 7/8L STL
