Parts For Sale TEGAL 53-066-001 TEGAL 53-066-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 53-066-001 Manufacturer TEGAL Part Number 53-066-001 Description Status Available Approx. Qty Unknown Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New – US Other TEGAL Parts 74-274-001 58-053-001 40-481-002 Insulator Ring 40-395-001 RING, FLAT 6 80-195-450 CR1008-00408EX CR1008-00408EX 99-287-003 SHUTTLE INTERFACE BOARD 00-0917-2 5" GUIDE RING #G00-0917-2 CR-1113-00301 40-260-001 WINDOW, SAPPHIRE 1x2.5
