Parts For Sale TEGAL 53-066-001 TEGAL 53-066-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 53-066-001 Manufacturer TEGAL Part Number 53-066-001 Description Status Available Approx. Qty Unknown Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New – US Other TEGAL Parts 39-680-003 ELECTRODE, CONEHEAD VENTED 74-038-001 56-006-001 80-195-450 CR1144-00104 39-741-026 Tegal 903e lower electrode 1106915402 MOTOR AND PUMPP/N:1106915402 CR1144-00103 CR1144-00103 80-200-342 BAND CONT,FEM .125PIN .320L,BC 80-200-342 A4T1 PAD ETCHE ... 37-221-001 UPPER ELECT, .014 HOLE NO RAD. 41-399-001 Tegal Part # 41-399-001 Rev.A Gasket, RF-90XE 40-140-003 RING, INSULATOR, CERAMIC .20-99.5%
