Parts For Sale TEGAL 53-066-001 TEGAL 53-066-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 53-066-001 Manufacturer TEGAL Part Number 53-066-001 Description Status Available Approx. Qty Unknown Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New – US Other TEGAL Parts 57-027-001 52-058-002 74-038-001 56-006-001 39-756-003 74-003-002 80-200-342 BAND CONT,FEM .125PIN .320L,BC 80-200-342 A4T1 PAD ETCHE ... 40-790-001 FOCUS RING 58-046-001 41-399-001 Tegal Part # 41-399-001 Rev.A Gasket, RF-90XE 83-288-001