Parts For Sale TEGAL 53-066-001 TEGAL 53-066-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 53-066-001 Manufacturer TEGAL Part Number 53-066-001 Description Status Available Approx. Qty Unknown Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New – US Other TEGAL Parts 58-073-001 99-247-003 SPATULA INTERFACE CR1008-00104 46-1006-001 74-101-001 39-741-026 Tegal 903e lower electrode 40-140-001 RING, CERAMIC INSULATOR CR1144-00103 CR1144-00103 80-202-297 BELT 1/4W 115GRV 80-202-297 A4T1 PAD ETCHER TEGAL 903E CR1303-10202 56-055-001 55-008-001 BELT SPAT
