Parts For Sale TEGAL 52-186-001 TEGAL 52-186-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 52-186-001 Manufacturer TEGAL Part Number 52-186-001 Description Status Available Approx. Qty Unknown Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New – US Other TEGAL Parts 58-073-001 39-853-005 CR1008-00104 40-481-002 Insulator Ring 74-101-001 99-138-004 PRINTED CIRCUIT BOARD TEGAL 99-138-004 TEMP MONITOR PCB CR1144-00103 CR1144-00103 CR1303-10202 56-055-001