Parts For Sale TEGAL 52-186-001 TEGAL 52-186-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 52-186-001 Manufacturer TEGAL Part Number 52-186-001 Description Status Available Approx. Qty Unknown Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New – US Other TEGAL Parts 74-274-001 58-053-001 93-229-005 RF CABLE 901E 80-195-450 CR1008-00408EX CR1008-00408EX 39-761-001 00-0917-2 5" GUIDE RING #G00-0917-2 CR-1113-00301 99-249-002 PCB TEGAL END POINT DETECTOR 41-399-001 Tegal Part # 41-399-001 Rev.A Gasket, RF-90XE