Parts For Sale TEGAL 52-186-001 TEGAL 52-186-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 52-186-001 Manufacturer TEGAL Part Number 52-186-001 Description Status Available Approx. Qty Unknown Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New – US Other TEGAL Parts 57-027-001 99-247-003 SPATULA INTERFACE 39-680-003 ELECTRODE, CONEHEAD VENTED 80-650-053 ACTUATOR 74-038-001 56-006-001 99-138-004 PRINTED CIRCUIT BOARD TEGAL 99-138-004 TEMP MONITOR PCB 74-003-002 58-046-001 50-056-001 41-399-001 Tegal Part # 41-399-001 Rev.A Gasket, RF-90XE 83-288-001