Parts For Sale TEGAL 52-175-001 TEGAL 52-175-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 52-175-001 Manufacturer TEGAL Part Number 52-175-001 Description Status Available Approx. Qty Unknown Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New – US Other TEGAL Parts 74-106-001 58-053-001 00-0917-2 5" GUIDE RING #G00-0917-2 40-295-003 FOCUS RING 40-260-001 WINDOW, SAPPHIRE 1x2.5 83-259-001 40-576-003-C Ring Ceramic Focus Castellated 37-221-001 UPPER ELECT, .014 HOLE NO RAD. 83-108-001 CR1008-00206RW 83-288-001
