Parts For Sale TEGAL 52-175-001 TEGAL 52-175-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 52-175-001 Manufacturer TEGAL Part Number 52-175-001 Description Status Available Approx. Qty Unknown Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New – US Other TEGAL Parts 74-038-001 56-006-001 80-195-450 CR1144-00104 40-140-001 RING, CERAMIC INSULATOR 1106915402 MOTOR AND PUMPP/N:1106915402 CR1144-00103 CR1144-00103 40-304-001 ELECTRODE, INSULATOR LOWER 37-222-002 Cooling Plate 40-140-003 RING, INSULATOR, CERAMIC .20-99.5% 150 mm 150 mm 25 slot Aluminum wafer carrier.
