Parts For Sale TEGAL 52-175-001 TEGAL 52-175-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 52-175-001 Manufacturer TEGAL Part Number 52-175-001 Description Status Available Approx. Qty Unknown Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New – US Other TEGAL Parts 56-006-001 74-038-001 80-195-450 99-138-004 PRINTED CIRCUIT BOARD TEGAL 99-138-004 TEMP MONITOR PCB CR1144-00104 1106915402 MOTOR AND PUMPP/N:1106915402 40-260-001 WINDOW, SAPPHIRE 1x2.5 56-031-001 50-056-001