Parts For Sale TEGAL 52-175-001 TEGAL 52-175-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 52-175-001 Manufacturer TEGAL Part Number 52-175-001 Description Status Available Approx. Qty Unknown Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New – US Other TEGAL Parts 57-027-001 74-038-001 56-006-001 33-085-002 BELLOW,LWR ELCTD #33-085-002 A4T1 PAD ETCHER TEGAL 903E 99-287-003 SHUTTLE INTERFACE BOARD 40-159-001 ROD SAPPHIRE .25DIA STRAIGHT 74-003-002 58-046-001 39-680-005 ELECTRODE, UPPER VENTED HARD ANOD. 83-288-001