Parts For Sale TEGAL 52-140-002 TEGAL 52-140-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 52-140-002 Manufacturer TEGAL Part Number 52-140-002 Description Status Available Approx. Qty 422 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 422.0 US Other TEGAL Parts 58-073-001 74-101-001 99-138-004 PRINTED CIRCUIT BOARD TEGAL 99-138-004 TEMP MONITOR PCB 40-467-001 39-741-026 Tegal 903e lower electrode 39-894-001 39-956-001 93-123-006 BELT 52-171-001 80-200-053 CLAMP,HOSE,WORM DR,2 1/4,SST 40-304-001 ELECTRODE, INSULATOR LOWER