Parts For Sale TEGAL 52-140-002 TEGAL 52-140-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 52-140-002 Manufacturer TEGAL Part Number 52-140-002 Description Status Available Approx. Qty 422 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 422.0 US Other TEGAL Parts 200 ASHER, TEGAL PLASMALINE 200 8.5X7D METAL CHAMBER 5-8-02 58-073-001 40-768-004 Insulator Ring 39-853-005 40-395-002 Ring Ceramic 125C Castellated 37-383-004 46-810-001 40-467-001 39-894-001 52-171-001 37-221-001 UPPER ELECT, .014 HOLE NO RAD.
