Parts For Sale TEGAL 52-140-002 TEGAL 52-140-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 52-140-002 Manufacturer TEGAL Part Number 52-140-002 Description Status Available Approx. Qty 422 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 422.0 US Other TEGAL Parts 58-073-001 37-181-001 74-101-001 39-894-001 39-761-001 99-287-003 SHUTTLE INTERFACE BOARD 39-956-001 40-304-001 ELECTRODE, INSULATOR LOWER 50-056-001 37-222-002 Cooling Plate
