Parts For Sale TEGAL 52-106-001 TEGAL 52-106-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 52-106-001 Manufacturer TEGAL Part Number 52-106-001 Description Status Available Approx. Qty 4 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 4.0 US Other TEGAL Parts 40-395-002 Ring Ceramic 125C Castellated 161-0040K VALVE, INLINE VACUUM 46-1006-001 37-411-001 54-011-001 37-605-001 58-043-004 CR1144-00103 CR1144-00103 40-790-001 FOCUS RING 37-479-001B 80-202-357 O-Ring 37-221-001 UPPER ELECT, .014 HOLE NO RAD.
