Parts For Sale TEGAL 52-105-001 TEGAL 52-105-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 52-105-001 Manufacturer TEGAL Part Number 52-105-001 Description Status Available Approx. Qty Unknown Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New – US Other TEGAL Parts 74-274-001 58-053-001 31-406-003 WAFER SENSOR ASSY-VCE 80-195-450 CR1008-00408EX CR1008-00408EX 00-0917-2 5" GUIDE RING #G00-0917-2 CR-1113-00301 37-221-003 UPPER ELECT ANOD., .021 HOLE RAD. HOLE 40-790-001 FOCUS RING 200 ASHER, TEGAL PLASMALINE 200 8.5X7D METAL CHAMBER 5-8-02
