Parts For Sale TEGAL 52-167-001 TEGAL 52-167-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 52-167-001 Manufacturer TEGAL Part Number 52-167-001 Description Status Available Approx. Qty Unknown Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New – US Other TEGAL Parts 40-768-004 Insulator Ring 74-274-001 58-053-001 46-1006-001 93-229-005 RF CABLE 901E 80-195-450 99-138-004 PRINTED CIRCUIT BOARD TEGAL 99-138-004 TEMP MONITOR PCB 80-095-057 PROBE TEMPERATURE 3/160D 4L SST OPM: ANALOG DEVICES P/N ... CR1008-00408EX CR1008-00408EX 00-0917-2 5" GUIDE RING #G00-0917-2 CR-1113-00301 37-221-001 UPPER ELECT, .014 HOLE NO RAD.