Parts For Sale TEGAL 52-167-001 TEGAL 52-167-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 52-167-001 Manufacturer TEGAL Part Number 52-167-001 Description Status Available Approx. Qty Unknown Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New – US Other TEGAL Parts 57-027-001 37-221-002 UPPER ELECT ANOD, NON ANODIZED 52-058-002 39-680-003 ELECTRODE, CONEHEAD VENTED 74-038-001 74-003-002 93-123-006 BELT 58-046-001 39-735-004 Tegal 903e lower electrode 83-288-001 52-175-001