Parts For Sale TEGAL 52-167-001 TEGAL 52-167-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 52-167-001 Manufacturer TEGAL Part Number 52-167-001 Description Status Available Approx. Qty Unknown Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New – US Other TEGAL Parts 58-073-001 CR1008-00104 83-259-001 74-101-001 CR1144-00103 CR1144-00103 39-733-004 Tegal 903e lower electrode 40-790-001 FOCUS RING CR1303-10202 56-055-001
