Parts For Sale TEGAL 52-167-001 TEGAL 52-167-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 52-167-001 Manufacturer TEGAL Part Number 52-167-001 Description Status Available Approx. Qty Unknown Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New – US Other TEGAL Parts 39-680-003 ELECTRODE, CONEHEAD VENTED 31-406-003 WAFER SENSOR ASSY-VCE 38-023-001 COOLING RING 56-006-001 74-038-001 80-195-450 CR1144-00104 1106915402 MOTOR AND PUMPP/N:1106915402 80-202-357 O-Ring 39-818-001 SLEEVE,FIBER OPTIC #39-818-001 A4T1 PAD ETCHER TEGAL 903E 52-175-001 150 mm 150 mm 25 slot Aluminum wafer carrier.
