Parts For Sale TEGAL 52-080-001 TEGAL 52-080-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 52-080-001 Manufacturer TEGAL Part Number 52-080-001 Description Status Available Approx. Qty 94 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 94.0 US Other TEGAL Parts 33-349-004 ELECTRODE, CONDEHEAD UPPER 40-395-003 RING 4" CASTELLATED W/ FLAT CUTAWAY 37-383-004 80-650-053 ACTUATOR 46-810-001 40-467-001 39-894-001 29-464-001 SPR, TEGAL KIT CHMBR GRND OEM PN equiv: 29-464-001 99-287-003 SHUTTLE INTERFACE BOARD 39-832-001 52-171-001 50-056-001
