Parts For Sale TEGAL 52-080-001 TEGAL 52-080-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 52-080-001 Manufacturer TEGAL Part Number 52-080-001 Description Status Available Approx. Qty 94 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 94.0 US Other TEGAL Parts 58-073-001 52-058-002 161-0040K VALVE, INLINE VACUUM 40-481-002 Insulator Ring 74-101-001 40-467-001 39-741-026 Tegal 903e lower electrode 39-894-001 39-956-001 52-171-001 40-260-001 WINDOW, SAPPHIRE 1x2.5 39-735-004 Tegal 903e lower electrode
