Parts For Sale TEGAL 51-219-003 TEGAL 51-219-003 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 51-219-003 Manufacturer TEGAL Part Number 51-219-003 Description Status Available Approx. Qty Unknown Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New – US Other TEGAL Parts 37-221-002 UPPER ELECT ANOD, NON ANODIZED 33-349-004 ELECTRODE, CONDEHEAD UPPER 40-768-006 Insulator Ring 99-247-003 SPATULA INTERFACE 51-259-003 51-232-001 52-050-001 29-464-001 SPR, TEGAL KIT CHMBR GRND OEM PN equiv: 29-464-001 52-167-001 99-249-002 PCB TEGAL END POINT DETECTOR 58-046-001 83-288-001