Parts For Sale TEGAL 51-286-001 TEGAL 51-286-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 51-286-001 Manufacturer TEGAL Part Number 51-286-001 Description Status Available Approx. Qty Unknown Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New – US Other TEGAL Parts 39-741-004 ELECTRODE, LOWER 6" 40-395-002 Ring Ceramic 125C Castellated 38-023-001 COOLING RING 74-038-001 33-085-002 BELLOW,LWR ELCTD #33-085-002 A4T1 PAD ETCHER TEGAL 903E 52-050-001 74-003-002 52-167-001 58-046-001 83-288-001