Parts For Sale TEGAL 51-219-002 TEGAL 51-219-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 51-219-002 Manufacturer TEGAL Part Number 51-219-002 Description Status Available Approx. Qty Unknown Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New – US Other TEGAL Parts 58-073-001 37-221-002 UPPER ELECT ANOD, NON ANODIZED 39-741-004 ELECTRODE, LOWER 6" CR1008-00104 46-1006-001 74-101-001 40-140-001 RING, CERAMIC INSULATOR 29-464-001 SPR, TEGAL KIT CHMBR GRND OEM PN equiv: 29-464-001 99-287-003 SHUTTLE INTERFACE BOARD CR1144-00103 CR1144-00103 CR1303-10202 56-055-001