Parts For Sale TEGAL 51-219-002 TEGAL 51-219-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 51-219-002 Manufacturer TEGAL Part Number 51-219-002 Description Status Available Approx. Qty Unknown Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New – US Other TEGAL Parts 58-053-001 51-269-001 31-406-003 WAFER SENSOR ASSY-VCE 40-481-002 Insulator Ring 80-195-450 CR1008-00408EX CR1008-00408EX 99-287-003 SHUTTLE INTERFACE BOARD 00-0917-2 5" GUIDE RING #G00-0917-2 CR-1113-00301 80-200-053 CLAMP,HOSE,WORM DR,2 1/4,SST 41-399-001 Tegal Part # 41-399-001 Rev.A Gasket, RF-90XE