Parts For Sale TEGAL 51-161-001 TEGAL 51-161-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 51-161-001 Manufacturer TEGAL Part Number 51-161-001 Description Status Available Approx. Qty Unknown Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New – US Other TEGAL Parts 37-221-002 UPPER ELECT ANOD, NON ANODIZED 51-259-003 51-191-001 52-050-001 80-095-057 PROBE TEMPERATURE 3/160D 4L SST OPM: ANALOG DEVICES P/N ... 29-464-001 SPR, TEGAL KIT CHMBR GRND OEM PN equiv: 29-464-001 37-221-003 UPPER ELECT ANOD., .021 HOLE RAD. HOLE 52-167-001 40-304-001 ELECTRODE, INSULATOR LOWER 37-221-001 UPPER ELECT, .014 HOLE NO RAD. 58-046-001 83-288-001