Parts For Sale TEGAL 47-526-004 TEGAL 47-526-004 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 47-526-004 Manufacturer TEGAL Part Number 47-526-004 Description Status Available Approx. Qty 13 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 13.0 US Other TEGAL Parts 58-073-001 40-768-006 Insulator Ring 74-101-001 40-467-001 39-894-001 29-464-001 SPR, TEGAL KIT CHMBR GRND OEM PN equiv: 29-464-001 39-956-001 52-047-002 39-680-005 ELECTRODE, UPPER VENTED HARD ANOD. 39-735-004 Tegal 903e lower electrode
