Parts For Sale TEGAL 47-421-001 TEGAL 47-421-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 47-421-001 Manufacturer TEGAL Part Number 47-421-001 Description Status Available Approx. Qty 9 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 9.0 US Other TEGAL Parts 40-768-006 Insulator Ring 46-1006-001 47-526-001 51-191-001 46-786-001 47-672-001 40-159-001 ROD SAPPHIRE .25DIA STRAIGHT 40-295-003 FOCUS RING 52-059-001 83-288-001