Parts For Sale TEGAL 46-901-002 TEGAL 46-901-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 46-901-002 Manufacturer TEGAL Part Number 46-901-002 Description Status Available Approx. Qty 8 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 8.0 US Other TEGAL Parts 150 mm 150 mm 25 slot Aluminum wafer carrier. 47-639-001 40-395-003 RING 4" CASTELLATED W/ FLAT CUTAWAY 40-768-006 Insulator Ring 47-080-003 47-155-001 40-374-006 83-259-001 46-787-002 46-912-002