Parts For Sale TEGAL 46-542-013 TEGAL 46-542-013 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 46-542-013 Manufacturer TEGAL Part Number 46-542-013 Description Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 1.0 US Other TEGAL Parts 80-195-450 51-056-001 42-826-005 99-138-004 PRINTED CIRCUIT BOARD TEGAL 99-138-004 TEMP MONITOR PCB 47-006-002 47-161-001 37-221-003 UPPER ELECT ANOD., .021 HOLE RAD. HOLE 37-175-001A 200 ASHER, TEGAL PLASMALINE 200 8.5X7D METAL CHAMBER 5-8-02