Parts For Sale TEGAL 46-238-001 TEGAL 46-238-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 46-238-001 Manufacturer TEGAL Part Number 46-238-001 Description Status Available Approx. Qty 8 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 8.0 US Other TEGAL Parts 37-181-001 46-879-001 38-023-001 COOLING RING 39-756-003 99-138-004 PRINTED CIRCUIT BOARD TEGAL 99-138-004 TEMP MONITOR PCB 47-583-001 99-287-003 SHUTTLE INTERFACE BOARD 39-956-001 47-695-001 50-056-001 41-399-001 Tegal Part # 41-399-001 Rev.A Gasket, RF-90XE 200 ASHER, TEGAL PLASMALINE 200 8.5X7D METAL CHAMBER 5-8-02