Parts For Sale TEGAL 42-912-02 TEGAL 42-912-02 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 42-912-02 Manufacturer TEGAL Part Number 42-912-02 Description Status Available Approx. Qty 18 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 18.0 US Other TEGAL Parts 40-481-002 Insulator Ring 47-155-001 40-374-006 46-787-002 46-912-002 47-639-001 47-080-003 40-140-003 RING, INSULATOR, CERAMIC .20-99.5% 200 ASHER, TEGAL PLASMALINE 200 8.5X7D METAL CHAMBER 5-8-02 150 mm 150 mm 25 slot Aluminum wafer carrier.