Parts For Sale TEGAL 42-509-003 TEGAL 42-509-003 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 42-509-003 Manufacturer TEGAL Part Number 42-509-003 Description Status Available Approx. Qty 39 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 39.0 US Other TEGAL Parts 46-879-001 99-247-003 SPATULA INTERFACE 42-667-001 40-481-002 Insulator Ring 44-757-001 47-583-001 39-761-001 47-695-001 50-056-001 200 ASHER, TEGAL PLASMALINE 200 8.5X7D METAL CHAMBER 5-8-02 150 mm 150 mm 25 slot Aluminum wafer carrier.