Parts For Sale TEGAL 42-667-001 TEGAL 42-667-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 42-667-001 Manufacturer TEGAL Part Number 42-667-001 Description Status Available Approx. Qty 83 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 83.0 US Other TEGAL Parts 39-741-004 ELECTRODE, LOWER 6" 83-259-001 49-078-002 99-138-004 PRINTED CIRCUIT BOARD TEGAL 99-138-004 TEMP MONITOR PCB 43-014-006 49-060-001 46-630-001 40-260-001 WINDOW, SAPPHIRE 1x2.5 47-385-002 51-265-001 37-222-002 Cooling Plate