Parts For Sale TEGAL 41-366-001 TEGAL 41-366-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 41-366-001 Manufacturer TEGAL Part Number 41-366-001 Description Status Available Approx. Qty 8 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 8.0 US Other TEGAL Parts 46-879-001 39-853-005 42-667-001 31-406-003 WAFER SENSOR ASSY-VCE 44-757-001 47-583-001 47-695-001 80-200-053 CLAMP,HOSE,WORM DR,2 1/4,SST 50-056-001 150 mm 150 mm 25 slot Aluminum wafer carrier.