Parts For Sale TEGAL 41-366-001 TEGAL 41-366-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 41-366-001 Manufacturer TEGAL Part Number 41-366-001 Description Status Available Approx. Qty 8 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 8.0 US Other TEGAL Parts 47-158-002 40-768-006 Insulator Ring 99-247-003 SPATULA INTERFACE 42-508-001 39-741-026 Tegal 903e lower electrode 43-014-001 44-261-002 46-925-001 44-960-001 39-733-004 Tegal 903e lower electrode 40-260-001 WINDOW, SAPPHIRE 1x2.5 40-304-001 ELECTRODE, INSULATOR LOWER