Parts For Sale TEGAL 30-084-001C TEGAL 30-084-001C Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 30-084-001C Manufacturer TEGAL Part Number 30-084-001C Description Status Available Approx. Qty Unknown Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New – US Other TEGAL Parts 46-177-001 37-223-008 31-406-003 WAFER SENSOR ASSY-VCE 40-374-006 46-787-002 50-079-002 37-221-003 UPPER ELECT ANOD., .021 HOLE RAD. HOLE 40-260-001 WINDOW, SAPPHIRE 1x2.5 83-288-001 150 mm 150 mm 25 slot Aluminum wafer carrier.