Parts For Sale TEGAL 30-084-001C TEGAL 30-084-001C Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 30-084-001C Manufacturer TEGAL Part Number 30-084-001C Description Status Available Approx. Qty Unknown Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New – US Other TEGAL Parts 33-349-004 ELECTRODE, CONDEHEAD UPPER 31-406-003 WAFER SENSOR ASSY-VCE 93-229-005 RF CABLE 901E 37-525-002 37-605-001 39-741-026 Tegal 903e lower electrode CR1144-00103 CR1144-00103 51-263-001 37-479-001B 39-680-005 ELECTRODE, UPPER VENTED HARD ANOD. 39-367-001 150 mm 150 mm 25 slot Aluminum wafer carrier.