Parts For Sale TEGAL 99-187-002 TEGAL 99-187-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 99-187-002 Manufacturer TEGAL Part Number 99-187-002 Description Tegal 99-187-002 Interface Board Rev.B Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Unknown 1.0 US Other TEGAL Parts 40-768-004 Insulator Ring 44-432-002 37-411-001 41-395-001 51-228-001 80-200-053 CLAMP,HOSE,WORM DR,2 1/4,SST 32-260-001 39-818-001 SLEEVE,FIBER OPTIC #39-818-001 A4T1 PAD ETCHER TEGAL 903E 32-356-001 39-735-004 Tegal 903e lower electrode 80-200-121 BEARING DOOR T915 TEGAL CORPORATION