Parts For Sale TEGAL 83-073-001 TEGAL 83-073-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 83-073-001 Manufacturer TEGAL Part Number 83-073-001 Description Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 1.0 US Other TEGAL Parts 39-741-004 ELECTRODE, LOWER 6" 51-259-003 39-741-026 Tegal 903e lower electrode 52-050-001 39-761-001 46-1000-001 52-167-001 58-046-001 37-471-001A