Parts For Sale TEGAL 74-104-001 TEGAL 74-104-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 74-104-001 Manufacturer TEGAL Part Number 74-104-001 Description Status Available Approx. Qty 4 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 4.0 US Other TEGAL Parts 51-259-003 40-481-002 Insulator Ring 46-1006-001 52-050-001 46-1000-001 52-167-001 58-046-001 50-056-001 39-735-004 Tegal 903e lower electrode 37-471-001A