Parts For Sale TEGAL 58-052-001 TEGAL 58-052-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 58-052-001 Manufacturer TEGAL Part Number 58-052-001 Description Status Available Approx. Qty 9 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 9.0 US Other TEGAL Parts 40-768-004 Insulator Ring 46-1006-001 74-098-001 40-140-001 RING, CERAMIC INSULATOR 52-050-001 46-1000-001 37-221-003 UPPER ELECT ANOD., .021 HOLE RAD. HOLE 52-167-001 37-221-001 UPPER ELECT, .014 HOLE NO RAD. 58-046-001 37-471-001A