Parts For Sale TEGAL 56-042-001 TEGAL 56-042-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 56-042-001 Manufacturer TEGAL Part Number 56-042-001 Description Status Available Approx. Qty Unknown Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New – US Other TEGAL Parts 55-008-001 BELT SPAT 150 mm 150 mm 25 slot Aluminum wafer carrier. 74-274-001 33-349-004 ELECTRODE, CONDEHEAD UPPER 58-053-001 31-406-003 WAFER SENSOR ASSY-VCE 80-195-450 99-138-004 PRINTED CIRCUIT BOARD TEGAL 99-138-004 TEMP MONITOR PCB CR1008-00408EX CR1008-00408EX 00-0917-2 5" GUIDE RING #G00-0917-2 CR-1113-00301