Parts For Sale TEGAL 56-039-001 TEGAL 56-039-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 56-039-001 Manufacturer TEGAL Part Number 56-039-001 Description Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 1.0 US Other TEGAL Parts 80-195-450 51-056-001 42-826-005 39-380-001 51-178-001 37-175-001A 40-304-001 ELECTRODE, INSULATOR LOWER 37-221-001 UPPER ELECT, .014 HOLE NO RAD. 150 mm 150 mm 25 slot Aluminum wafer carrier.