Parts For Sale TEGAL 53-074-002 TEGAL 53-074-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 53-074-002 Manufacturer TEGAL Part Number 53-074-002 Description Status Available Approx. Qty Unknown Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New – US Other TEGAL Parts 57-027-001 58-073-001 40-768-006 Insulator Ring 83-259-001 74-101-001 39-741-026 Tegal 903e lower electrode 74107-002 83-254-002 37-221-001 UPPER ELECT, .014 HOLE NO RAD. 56-055-001 37-222-002 Cooling Plate
