Parts For Sale TEGAL 52-188-002 TEGAL 52-188-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 52-188-002 Manufacturer TEGAL Part Number 52-188-002 Description Status Available Approx. Qty 12 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 12.0 US Other TEGAL Parts 58-073-001 46-810-001 74-101-001 33-085-002 BELLOW,LWR ELCTD #33-085-002 A4T1 PAD ETCHER TEGAL 903E 40-467-001 39-741-026 Tegal 903e lower electrode 39-894-001 39-956-001 99-249-002 PCB TEGAL END POINT DETECTOR 40-260-001 WINDOW, SAPPHIRE 1x2.5 50-056-001