Parts For Sale TEGAL 52-171-001 TEGAL 52-171-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 52-171-001 Manufacturer TEGAL Part Number 52-171-001 Description Status Available Approx. Qty 13 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 13.0 US Other TEGAL Parts 39-853-005 38-023-001 COOLING RING 37-525-002 54-011-001 37-605-001 58-043-004 CR1144-00103 CR1144-00103 40-295-003 FOCUS RING 37-479-001B 39-818-001 SLEEVE,FIBER OPTIC #39-818-001 A4T1 PAD ETCHER TEGAL 903E 39-735-004 Tegal 903e lower electrode
