Parts For Sale TEGAL 52-170-001 TEGAL 52-170-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 52-170-001 Manufacturer TEGAL Part Number 52-170-001 Description Status Available Approx. Qty 19 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 19.0 US Other TEGAL Parts 58-073-001 39-741-004 ELECTRODE, LOWER 6" 40-395-003 RING 4" CASTELLATED W/ FLAT CUTAWAY 37-383-004 99-247-003 SPATULA INTERFACE 39-680-003 ELECTRODE, CONEHEAD VENTED 39-756-003 46-810-001 40-467-001 39-741-026 Tegal 903e lower electrode 39-894-001 52-171-001
