Parts For Sale TEGAL 52-170-001 TEGAL 52-170-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 52-170-001 Manufacturer TEGAL Part Number 52-170-001 Description Status Available Approx. Qty 19 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 19.0 US Other TEGAL Parts 58-073-001 39-741-004 ELECTRODE, LOWER 6" 33-349-004 ELECTRODE, CONDEHEAD UPPER 74-101-001 40-467-001 39-894-001 29-464-001 SPR, TEGAL KIT CHMBR GRND OEM PN equiv: 29-464-001 39-956-001 37-221-003 UPPER ELECT ANOD., .021 HOLE RAD. HOLE 52-171-001 80-202-357 O-Ring
