Parts For Sale TEGAL 52-170-001 TEGAL 52-170-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 52-170-001 Manufacturer TEGAL Part Number 52-170-001 Description Status Available Approx. Qty 19 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 19.0 US Other TEGAL Parts 58-073-001 37-181-001 74-101-001 99-138-004 PRINTED CIRCUIT BOARD TEGAL 99-138-004 TEMP MONITOR PCB 39-894-001 39-956-001 40-304-001 ELECTRODE, INSULATOR LOWER 50-056-001 37-222-002 Cooling Plate 39-735-004 Tegal 903e lower electrode
