Parts For Sale TEGAL 52-169-001 TEGAL 52-169-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 52-169-001 Manufacturer TEGAL Part Number 52-169-001 Description Status Available Approx. Qty 24 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 24.0 US Other TEGAL Parts 58-073-001 37-383-004 46-810-001 40-467-001 39-894-001 80-200-342 BAND CONT,FEM .125PIN .320L,BC 80-200-342 A4T1 PAD ETCHE ... 52-171-001 37-221-001 UPPER ELECT, .014 HOLE NO RAD. 40-140-003 RING, INSULATOR, CERAMIC .20-99.5% 150 mm 150 mm 25 slot Aluminum wafer carrier.