Parts For Sale TEGAL 52-169-001 TEGAL 52-169-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 52-169-001 Manufacturer TEGAL Part Number 52-169-001 Description Status Available Approx. Qty 24 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 24.0 US Other TEGAL Parts 58-073-001 40-395-003 RING 4" CASTELLATED W/ FLAT CUTAWAY 99-247-003 SPATULA INTERFACE 74-101-001 40-467-001 39-894-001 39-956-001 40-295-003 FOCUS RING 52-171-001 40-260-001 WINDOW, SAPPHIRE 1x2.5
