Parts For Sale TEGAL 52-154-002 TEGAL 52-154-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 52-154-002 Manufacturer TEGAL Part Number 52-154-002 Description Status Available Approx. Qty 2 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 2.0 US Other TEGAL Parts 58-073-001 40-481-002 Insulator Ring 74-101-001 40-467-001 40-140-001 RING, CERAMIC INSULATOR 39-894-001 39-956-001 39-733-004 Tegal 903e lower electrode 52-171-001 39-735-004 Tegal 903e lower electrode 200 ASHER, TEGAL PLASMALINE 200 8.5X7D METAL CHAMBER 5-8-02
