Parts For Sale TEGAL 52-154-002 TEGAL 52-154-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 52-154-002 Manufacturer TEGAL Part Number 52-154-002 Description Status Available Approx. Qty 2 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 2.0 US Other TEGAL Parts 58-073-001 37-221-002 UPPER ELECT ANOD, NON ANODIZED 37-383-004 46-810-001 40-467-001 39-741-026 Tegal 903e lower electrode 39-894-001 52-171-001 37-221-001 UPPER ELECT, .014 HOLE NO RAD. 41-399-001 Tegal Part # 41-399-001 Rev.A Gasket, RF-90XE
