Parts For Sale TEGAL 52-154-002 TEGAL 52-154-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 52-154-002 Manufacturer TEGAL Part Number 52-154-002 Description Status Available Approx. Qty 2 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 2.0 US Other TEGAL Parts 58-073-001 37-181-001 74-101-001 39-741-026 Tegal 903e lower electrode 39-894-001 39-956-001 93-123-006 BELT 50-056-001 37-222-002 Cooling Plate 40-140-003 RING, INSULATOR, CERAMIC .20-99.5%
