Parts For Sale TEGAL 52-154-001 TEGAL 52-154-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 52-154-001 Manufacturer TEGAL Part Number 52-154-001 Description Status Available Approx. Qty 2 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 2.0 US Other TEGAL Parts 80-200-144 BSHG BALL 3/8B 5/8OD 7/8L STL 58-073-001 40-768-004 Insulator Ring 37-181-001 74-101-001 39-894-001 39-956-001 37-221-003 UPPER ELECT ANOD., .021 HOLE RAD. HOLE 50-056-001 37-222-002 Cooling Plate
