Parts For Sale TEGAL 52-154-001 TEGAL 52-154-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 52-154-001 Manufacturer TEGAL Part Number 52-154-001 Description Status Available Approx. Qty 2 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 2.0 US Other TEGAL Parts 83-288-001 150 mm 150 mm 25 slot Aluminum wafer carrier. 46-177-001 39-680-003 ELECTRODE, CONEHEAD VENTED 37-223-008 40-374-006 46-787-002 99-138-004 PRINTED CIRCUIT BOARD TEGAL 99-138-004 TEMP MONITOR PCB 50-079-002 40-140-001 RING, CERAMIC INSULATOR 40-304-001 ELECTRODE, INSULATOR LOWER
