Parts For Sale TEGAL 52-154-001 TEGAL 52-154-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 52-154-001 Manufacturer TEGAL Part Number 52-154-001 Description Status Available Approx. Qty 2 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 2.0 US Other TEGAL Parts 40-768-004 Insulator Ring 74-098-001 52-050-001 46-1000-001 39-733-004 Tegal 903e lower electrode 52-167-001 99-249-002 PCB TEGAL END POINT DETECTOR 58-046-001 37-471-001A