Parts For Sale TEGAL 52-154-001 TEGAL 52-154-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 52-154-001 Manufacturer TEGAL Part Number 52-154-001 Description Status Available Approx. Qty 2 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 2.0 US Other TEGAL Parts 150 mm 150 mm 25 slot Aluminum wafer carrier. 58-073-001 40-768-004 Insulator Ring 37-383-004 80-650-053 ACTUATOR 46-810-001 40-467-001 80-095-057 PROBE TEMPERATURE 3/160D 4L SST OPM: ANALOG DEVICES P/N ... 39-894-001 39-733-004 Tegal 903e lower electrode 52-171-001 80-200-053 CLAMP,HOSE,WORM DR,2 1/4,SST
