Parts For Sale TEGAL 52-151-001 TEGAL 52-151-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 52-151-001 Manufacturer TEGAL Part Number 52-151-001 Description Status Available Approx. Qty Unknown Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New – US Other TEGAL Parts 38-023-001 COOLING RING 56-006-001 74-038-001 80-195-450 CR1144-00104 40-159-001 ROD SAPPHIRE .25DIA STRAIGHT 1106915402 MOTOR AND PUMPP/N:1106915402 40-295-003 FOCUS RING 39-733-004 Tegal 903e lower electrode 80-202-357 O-Ring 37-222-002 Cooling Plate 52-175-001
