Parts For Sale TEGAL 52-151-001 TEGAL 52-151-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 52-151-001 Manufacturer TEGAL Part Number 52-151-001 Description Status Available Approx. Qty Unknown Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New – US Other TEGAL Parts 57-027-001 40-768-004 Insulator Ring 74-038-001 29-464-001 SPR, TEGAL KIT CHMBR GRND OEM PN equiv: 29-464-001 74-003-002 52-167-001 58-046-001 55-008-001 BELT SPAT 83-288-001