Parts For Sale TEGAL 52-148-001 TEGAL 52-148-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 52-148-001 Manufacturer TEGAL Part Number 52-148-001 Description Status Available Approx. Qty 3 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 3.0 US Other TEGAL Parts 58-073-001 37-181-001 40-395-002 Ring Ceramic 125C Castellated 39-756-003 74-101-001 39-894-001 99-287-003 SHUTTLE INTERFACE BOARD 39-956-001 50-056-001
